@inbook{inbook, title  = {{3D determination of a MOSFET gate morphology by FIB tomography}},

 url = {{}},

 year = {{2018}},

 month = {{1}},

 author = {{Inkson BJ and Olsen S and Norris DJ and Oʼneill AG and Mobus G}},

 doi = {{10.1201/9781351074636}},

 isbn = {{9781315895536}},

 pages = {{611-616}},

 note = {{Accessed on 2025/04/22}}}